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Jin Phil Choi
Institution:
Samsung Electronics (South Korea)
Observed institution:
Samsung Electronics (South Korea)
OpenAlex ID:
A5113657494
Lens heating impact analysis and controls for critical device layers by computational method
2013
·
Du Hyun Beak
, Jin Phil Choi
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
16
Improvement of inter-field CDU by using on-product focus control
2014
·
Kyeong Dong Park
, Tony Park
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
13
Focus control budget analysis for critical layers of flash devices
2014
·
Jong Hoon Jang
, Tony Park
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
5
Scanner-to-scanner CD analysis and control in an HVM environment
2017
·
Du Hyun Beak
, Ju Hee Shin
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
4
Process margin improvement through finger-print removal based on scanner leveling data
2017
·
Young Jun Kim
, Tony Park
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
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Works count:
5
Citation count:
38
H-index:
4
I10-index:
2
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