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Ah-Jin Jo
Observed names:
Ah Jin Jo,
Ah-jin Jo,
Ahjin Jo
OpenAlex ID:
A5113816018
High-speed lateral scanning white-light phase shift interferometry
2024
·
Jaeseung Im
, Byoung-Woon Ahn
, et al.
·
Optics Express
·
18
Automated measurement and analysis of sidewall roughness using three-dimensional atomic force microscopy
2022
·
Su-Been Yoo
, Seong-Hun Yun
, et al.
·
Han-guk hyeonmigyeong hakoeji/Applied microscopy
·
17
PDF
“Multipoint Force Feedback” Leveling of Massively Parallel Tip Arrays in Scanning Probe Lithography
2015
·
Hanaul Noh
, Goo-Eun Jung
, et al.
·
Small
·
12
High-throughput automatic defect review for 300mm blank wafers with atomic force microscope
2015
·
Ardavan Zandiatashbar
, Byong Kim
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
9
Automatic Defect Review of a Patterned Wafer using Hybrid Metrology
2021
·
ByungWoon Ahn
, Ahjin Jo
, et al.
·
IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
·
6
High-precision infrared-light interferometry for accurate overlay and alignment in three-dimensional semiconductor packaging
2025
·
Jaeseung Im
, Hyuntae Kim
, et al.
·
Optics & Laser Technology
·
5
In-line atomic resolution local nanotopography variation metrology for CMP process
2017
·
T.-G. Kim
, Natasja Heylen
, et al.
·
3
In-Line Critical Dimension and Sidewall Roughness Metrology Study for Compound Nanostructure Process Control by in-Line 3D Atomic Force Microscope
2016
·
Tae-Gon Kim
, Heon-Yul Ryu
, et al.
·
ECS Transactions
·
3
PDF
In-line metrology for atomic resolution local height variation
2017
·
Tae-Gon Kim
, Soon-Wook Kim
, et al.
·
ASMC proceedings
·
2
Lithography: “Multipoint Force Feedback” Leveling of Massively Parallel Tip Arrays in Scanning Probe Lithography (Small 35/2015)
2015
·
Hanaul Noh
, Goo-Eun Jung
, et al.
·
Small
·
1
PDF
Atomic Force Microscope: A Window into the Nanoworld
2025
·
Chul-Goo Kang
, Ah-Jin Jo
, et al.
·
International Conference on Control, Automation and Systems (ICCAS)
Simultaneous 3d characterization and repair of EUV mask defects
2023
·
Sang-Joon Cho
, Byoung-Woon Ahn
, et al.
·
SPIE Photomask Technology Conference
In-line metrology for atomic resolution local height variation
2017
·
Tae-Gon Kim
, Soon-Wook Kim
, et al.
·
International Convention on Information and Communication Technology, Electronics and Microelectronics
Atomic Resolution Quality Control for Fin Oxide Recess by Atomic Resolution Profiler
2016
·
Tae Gon Kim
, Heon Yul Ryu
, et al.
·
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
In-Line Critical Dimension and Sidewall Roughness Metrology Study for Compound Nanostructure Process Control by in-Line 3D Atomic Force Microscope
2016
·
Tae-Gon Kim
, Heon-Yul Ryu
, et al.
·
ECS Meeting Abstracts
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Works count:
15
Citation count:
76
H-index:
5
I10-index:
3
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