Work

High-throughput automatic defect review for 300mm blank wafers with atomic force microscope

Year: 2015

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2086042

Authors: Ardavan Zandiatashbar, Byong Kim, Young-kook Yoo, Keibock Lee, Ahjin Jo, Ju Suk Lee, Sang-Joon Cho, Sang-il Park

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2045600337

FWCI: 3.64

Cites: 2

Cited by: 9

Related to: 10