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M. Hendriks

Plasma-enhanced growth and composition of silicon oxynitride films
1986 · C. M. M. Denisse, K. Z. Troost, et al. · Journal of Applied Physics · 92
Annealing of plasma silicon oxynitride films
1986 · C. M. M. Denisse, K. Z. Troost, et al. · Journal of Applied Physics · 74
Additional X-ray and electron diffraction peaks of polycrystalline silicon films
1984 · M. Hendriks, S. Radelaar, et al. · Thin Solid Films · 40
Practical accuracy analysis of some existing effective channel length and series resistance extraction methods for MOSFET's
1998 · S. Biesemans, M. Hendriks, et al. · IEEE Transactions on Electron Devices · 32
Phosphorus Doped Polysilicon for Double Poly Structures: I . Morphology and Microstructure
1991 · M. Hendriks, C. Mavero · Journal of The Electrochemical Society · 32
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An Industrial LPCVD Process for In Situ Phosphorus‐Doped Polysilicon
1990 · J. G. M. Mulder, P. Eppenga, et al. · Journal of The Electrochemical Society · 24
Combined impurity gettering and defect passivation in polycrystalline silicon solar cells
1990 · L. A. Verhoef, P-P. Michiels, et al. · Applied Physics Letters · 22
Accurate determination of channel length, series resistance and junction doping profile for MOSFET optimisation in deep submicron technologies
2002 · S. Biesemans, M. Hendriks, et al. · Symposium on VLSI Technology · 15
Phosphorus Doped Poly Silicon for Double Poly Structures: II . Electrical Characteristics
1991 · M. Hendriks, C. Mavero · Journal of The Electrochemical Society · 15
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Hydrogen passivation of polycrystalline silicon solar cells by plasma deposition of silicon nitride
2002 · P.P. Michiels, L.A. Verhoef, et al. · Conference record of the IEEE Photovoltaic Specialists Conference · 12
X-ray diffraction study and electrical characterization of boron-implanted low-pressure chemical vapor deposited polycrystalline silicon layers
1984 · M. Hendriks, R. Delhez, et al. · Journal of Applied Physics · 8
Oxynitridation of Silicon and Postnitridation of Thermal Silicon Oxide in N 2 O in a Vertical Furnace
1997 · P. Lange, H. Boneß, et al. · Journal of The Electrochemical Society · 7
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FOM-Institute for Atomic and Molecular Physics, Amsterdam, * R&S Renewable Energy Systems B.V., Eindhoven, ** ASM Microelectronics Technology Centre, Bilthoven, The Netherlands.
1990 · M. Hendriks · 7
Plasma-induced fixed oxide charge
1989 · Jan Bos, Menso Hendriks · Journal of Applied Physics · 6
X-ray diffraction study of polycrystalline silicon layers
1985 · M. Hendriks · Research Repository (Delft University of Technology) · 3
Morphology and Resistivity of Cvd Polycrystalline Silicon Layers Containing Carbon
1982 · M. Hendriks, S. Radelaar, et al. · Le Journal de Physique Colloques · 3
Interface engineering in silicon semiconductor processing using a vacuum cluster tool
1994 · M. Hendriks · Microelectronic Engineering · 2
Cluster-Tool Integrated HF Vapor Etching for Native Oxide Free Processing
1993 · Chris Werkhoven, Ernst Granneman, et al. · MRS Proceedings · 2
Characterization and Optimization of the Lpcvd Silicon Oxynitride Process, Using the Design of Experiments Method
1991 · L. J. de LEGÉ, M. HENDRIKS · Journal de Physique IV (Proceedings) · 2
Reduction of Bitline to Control Gate Leakage for Improved Embedded 0.18 um FLASH Yield and Reliability
2002 · A. Cacciato, S. Nelson, et al. · European Solid-State Device Research Conference · 1
Poly-gate structures manufactured in a cluster tool
1993 · M. Hendriks, R. de Blank, et al. · Applied Surface Science · 1
A Comparative Study of Surface Particle Counters
1989 · Ch. M. Baas, H. P. Lengkeek, et al. · Journal of The Electrochemical Society · 1
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An Industrial Process for Bpsg-teos
1989 · P. EPPENGA, E. SCHUIVENS, et al. · Le Journal de Physique Colloques · 1
Control gate patterning optimisation for improved yield of 0.18um embedded FLASH technology
2001 · M. Hendriks, E. Gerritsen, et al. · European Solid-State Device Research Conference
MASIF: Material growth on an atomic scale for the realization of different kind of junctions for advanced nanometer-scale devices
2000 · Dave H. A. Blank, H. Verweij, et al.
Works count: 32
Citation count: 402
H-index: 10
I10-index: 10
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