Author

Sean Simmons

Institution: Brewer Science (United States)

Observed institution: Brewer Science (United States)

OpenAlex ID: A5113898563

Evaluating spin-on carbon materials at low temperatures for high wiggling resistance

2013 · Michael Weigand, Vandana Krishnamurthy, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7

Reducing bottom anti-reflective coating (BARC) defects: optimizing and decoupling the filtration and dispense process

2006 · Nickolas L. Brakensiek, Gary Martin, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3

High-Temperature-Stable, Spin-On Carbon Materials for High-Aspect-Ratio Gap-Fill Applications

2021 · Carissa Jones, Runhui Huang, et al. · ASMC proceedings · 2

High-refractive-index polymers with high transparency

2024 · Yunyan Wang, Runhui Huang, et al. · Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) · 1

Development of planarizing spin-on carbon material for high-temperature processes

2021 · Runhui Huang, Xing-Fu Zhong, et al. · China Semiconductor Technology International Conference (CSTIC) · 1

Super planarizing material for trench and via arrays

2020 · Runhui Huang, Xing-Fu Zhong, et al. · Advances in Patterning Materials and Processes · 1

Development of planarizing spin-on carbon material for high-temperature processes

2020 · Runhui Huang, Xing-Fu Zhong, et al. · Advances in Patterning Materials and Processes

Thin film characterization for advanced patterning

2019 · Zhimin Zhu, Xianggui Ye, et al. · SPIE Optical Microlithography

Tailorable BARC system to provide optimum solutions for various substrates in immersion lithography

2011 · Michael Swope, Vandana Krishnamurthy, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Works count: 9

Citation count: 15

H-index: 2

I10-index: