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A. Hessinger
Institution:
Silvaco (United Kingdom)
Observed institution:
Silvaco (United Kingdom)
OpenAlex ID:
A5114473031
Impact of Ion Energy and Yield in Oblique Ion Beam Etching Process for Blazed Gratings
2024
·
T. Reiter
, A. Toifl
, et al.
·
International Conference on Simulation of Semiconductor Processes and Devices
·
2
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Citation count:
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