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Nitzan Sadot
Institution:
Applied Materials (Israel)
Observed institution:
Applied Materials (Israel)
OpenAlex ID:
A5133165643
eBeam process control for yield and reliability in advanced HBM hybrid bonding
2026
·
Eran Gal
, Shunit Petachia-Halely
, et al.
·
Metrology, Inspection, and Process Control XXXVI
High resolution eBeam inspection (EBI) addressing advanced DRAM word line defectivity challenges
2026
·
Doyoung Yoon
, Ran Alkoken
, et al.
·
Metrology, Inspection, and Process Control XXXVI
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