Work

Nanoimprinting — a Key Enabling Technology for BioM EMS and Biomedical Applications

Year: 2004

Type: book-chapter

Source: Springer eBooks

DOI: 10.1007/978-3-642-18727-8_19

Authors: R. Eichinger-Heue, T. Glinsner, P. Kettner, P. Lindner, C. Schaefer, S. Dwyer, B. Vratzov

Institutions: EV Group (Austria), AMO (Germany)

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W12775274

FWCI:

Cites: 6

Cited by: 2

Related to: 10