Work

Implantation characteristics by boron cluster ion implantation

Year: 2006

Type: conference-paper

Source: AIP conference proceedings

DOI: 10.1063/1.2401491

Authors: Tsutomu Nagayama, Nariaki Hamamoto, Sei Umisedo, Masayasu Tanjyo, Takayuki Aoyama

Institutions: Nissin Ion Equipment Co., Ltd. (Japan), Fujitsu (Japan)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Japan Science and Technology Agency

OpenAlex ID: W1587249792

FWCI: 10.27

Cites:

Cited by: 8

Related to: 10