Work

An above-IC RF-MEMS switch

Year: 2003

Type: conference-paper

Source: Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference

DOI: 10.1109/isscc.2003.1234269

Authors: D. Saias, S. Boret, P. Robert, C. Billard, P.L. Charvet, G. Bouche, B. Diem, J.B. Quoirin, B. Berruyer, M. Laurens, J.C. Grasset, M. Aid, D. Belot, P. Ancey

Institutions: STMicroelectronics (France), Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1604530453

FWCI: 2.243

Cites: 6

Cited by: 10

Related to: 10