Work

Low RF loss and noise of transmission lines on Si substrates using an improved ion implantation process

Year: 2003

Type: conference-paper

Source: IEEE MTT-S International Microwave Symposium digest

DOI: 10.1109/mwsym.2003.1212529

Authors: K.T. Chan, A. Chin, S.P. McAlister, C.Y. Chang, C. Tseng, V. Liang, J.K. Chen, S.C. Chien, D.S. Duh, W.J. Lin

Institutions: National Yang Ming Chiao Tung University, National Research Council Canada, United Microelectronics (Taiwan), United Microelectronics (United States), Institute of Nuclear Energy Research

Language: English

Topic: Radio Frequency Integrated Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W1716351663

FWCI: 4.934

Cites: 8

Cited by: 17

Related to: 10