SON (silicon on nothing)-a new device architecture for the ULSI era
Year: 1999
Type: conference-paper
Source: Symposium on VLSI Technology
Authors: M. Jurczak, T. Skotnicki, M. Paoli, B. Tormen, J.-L. Regolini, C. Morin, A. Schiltz, J. Martins, R. Pantel, J. Galvier
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1920162676
