Work

3D characterization of a W/TiN/ Ti/Si contact structure using MULSAM

Year: 1998

Type: article

Source: Surface and Interface Analysis

DOI: 10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.0.co;2-w

Authors: R. H. Roberts, M. Prutton, D. K. Wilkinson, I. R. Barkshire, C. J. Hill, P. J. Pearson, P. D. Augustus, D. K. Skinner, K. Stribley

Institutions: University of York, GEC (United Kingdom)

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: European Commission

OpenAlex ID: W1965784196

FWCI: 0.753

Cites:

Cited by: 5

Related to: 10