Work

Nanomechanical characteristics of annealed Si/SiGe superlattices

Year: 2011

Type: article

Source: Applied Surface Science

DOI: 10.1016/j.apsusc.2011.05.015

Authors: Ming-Jhang Wu, Hua-Chiang Wen, Shyh-Chi Wu, Ping-Feng Yang, Yi-Shao Lai, Wen-Kuang Hsu, Wen-Fa Wu, Chang-Pin Chou

Institutions: National Yang Ming Chiao Tung University, National Tsing Hua University, National Chung Shan Institute of Science and Technology, Advanced Semiconductor Engineering (Taiwan)

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Council

OpenAlex ID: W1966204221

FWCI: 2.407

Cites: 36

Cited by: 15

Related to: 10