Work

Photomask clear defects repair using ultrafast laser technology

Year: 2004

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.557733

Authors: Guy Ben-Zvi, Nikolay Guletsky, Vladimir J. Dmitriev, Sergey V. Oshemkov, Eitan Zait

Institution: St Petersburg University

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1967054482

FWCI: 1.785

Cites: 5

Cited by: 5

Related to: 10