MOCVD growth of thick AlN and AlGaN superlattice structures on Si substrates
Year: 2005
Type: article
Source: Journal of Crystal Growth
Authors: M.A. Mastro, C.R. Eddy, D.K. Gaskill, N.D. Bassim, J. Casey, A. Rosenberg, R.T. Holm, R.L. Henry, M.E. Twigg
Institution: United States Naval Research Laboratory
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Funder: Office of Naval Research
OpenAlex ID: W1967083264