Work

Amorphous carbon thin films containing benzene rings for use as low-dielectric-constant interlayer dielectrics

Year: 1997

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.118935

Authors: Kazuhiko Endo, Toru Tatsumi

Institution: NEC (Japan)

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1968355607

FWCI: 3.036

Cites: 7

Cited by: 37

Related to: 10