Micro-Probe Reflection High-Energy Electron Diffraction Technique. I. Determination of Crystallographic Orientations of Polycrystal-Silicon Surfaces
Year: 1982
Type: article
Abstract: A micro-probe reflection high-energy electron diffraction (RHEED) apparatus including an electron gun with a probe size of 0.1 µm operated under ultrahigh vacuum, has been constructed. This makes it possible to obtain bright, sharp diffraction patterns from micro-areas of clean surfaces, and to take RHEED-microscope images of crystal surfaces. Using this apparatus, a technique for determining the crystallographic orientations of surface micro-areas within an accuracy of ±1° has been developed. This is done by analyzing Kikuchi patterns emitted at low angles, and spatial distributions having various crystallographic orientations are obtained by taking RHEED-microscope images. From the results of applying this technique to polycrystal-Silicon surfaces, it is found that it is very useful in determining the crystallographic orientations of surface micro-areas.
DOI: 10.1143/jjap.21.145
Authors: Masakazu Ichikawa, Kazunobu Hayakawa
Institution: Hitachi (Japan)
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W1968679855