Work

Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching

Year: 2002

Type: article

Source: Applied Surface Science

DOI: 10.1016/s0169-4332(01)00657-2

Authors: T. Katoh, D. Yamaguchi, Y. Satoh, S. Ikeda, Y. Aoki, M. Washio, Y. Tabata

Institutions: Sumitomo Heavy Industries (Japan), Waseda University, Raytech Corporation (Japan), The University of Tokyo

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1969970604

FWCI: 3.095

Cites: 14

Cited by: 28

Related to: 10