Author

T. Katoh

Observed name: T Katoh

Institution: Sumitomo Heavy Industries (Japan)

Observed institutions: Ritsumeikan University, Sumitomo Heavy Industries (Japan), NTT (Japan)

OpenAlex ID: A5111876868

High aspect ratio micromachining Teflon by direct exposure to synchrotron radiation

1995 · Y. Zhang, T. Katoh, et al. · Applied Physics Letters · 92

Synchrotron radiation ablative photodecomposition and production of crystalline fluoropolymer thin films

1996 · T. Katoh, Y. Zhang · Applied Physics Letters · 52

Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching

2002 · T. Katoh, D. Yamaguchi, et al. · Applied Surface Science · 28

Deposition of Teflon-polymer thin films by synchrotron radiation photodecomposition

1999 · T. Katoh, Y. Zhang · Applied Surface Science · 22

Petroleum pollution sensing at ppb level using quartz crystal resonators sputtered with porous polyethylene under photo-excitation

2000 · I Sugimoto, M Nakamura, et al. · Sensors and Actuators B Chemical · 21

High aspect ratio micromachining by synchrotron radiation direct photo-etching

1998 · T. Katoh, Y. Zhang · Microsystem Technologies · 19

Synchrotron radiation direct photo-etching of polymers and crystals for micromachining

1998 · T. Katoh, Y. Zhang · Journal of Synchrotron Radiation · 19

Gas-sorption effects on plasma polymer films characterized by XPS and quartz crystal resonator

2000 · I Sugimoto, M Nakamura, et al. · Polymer · 15

Changing Molecular Orientation in Fluorocarbon Thin Films Deposited by Different Photo-Processing: Synchrotron Radiation Etching vs Laser Ablation

2000 · Y. Zhang, T. Katoh, et al. · The Journal of Physical Chemistry B · 13

Deposition of highly oriented Teflon thin films by synchrotron radiation etching

2001 · Y. Zhang, T. Katoh, et al. · Journal of Electron Spectroscopy and Related Phenomena · 12

3-dimensional micromachining of PTFE using synchrotron radiation direct photo-etching

2003 · N. Nishi, T. Katoh, et al. · International Symposium on Micro-NanoMechatronics and Human Science · 9

Study on three-dimensional micromachining using synchrotron radiation etching

2002 · N. Nishi, T. Katoh, et al. · Microsystem Technologies · 8

Direct writing for three-dimensional microfabrication using synchrotron radiation etching

2002 · T. Katoh, N. Nishi, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 3

Deep lithography with a low energy synchrotron source: fabrication of X-ray refractive single lenses

2002 · Y. Zhang, T. Katoh, et al. · Microsystem Technologies · 3

Development of a microwave ion source for ion implantations

2015 · N. Takahashi, H. Murata, et al. · Review of Scientific Instruments · 2

Development of microwave ion source for industrial applications

2013 · N. Takahashi, H. Murata, et al. · Review of Scientific Instruments · 2

Deposition of functional carbon compound thin films by synchrotron radiation ablation

2001 · H. Miki, S. Lin, et al. · Diamond and Related Materials

Works count: 17

Citation count: 320

H-index: 10

I10-index: 10