Study on three-dimensional micromachining using synchrotron radiation etching
Year: 2002
Type: article
Source: Microsystem Technologies
Authors: N. Nishi, T. Katoh, H. Ueno, S. Sugiyama
Institutions: Ritsumeikan University, Sumitomo Heavy Industries (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1980820255