Development of a microwave ion source for ion implantations
Year: 2015
Type: article
Source: Review of Scientific Instruments
DOI: 10.1063/1.4935014
Institution: Sumitomo Heavy Industries (Japan)
Language: English
Subfield: Nuclear and High Energy Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2174235285