Work

Round robin investigation of silicon oxide on silicon reference materials for ellipsometry

Year: 1993

Type: article

Source: Applied Surface Science

DOI: 10.1016/0169-4332(93)90062-g

Authors: J. Vanhellemont, H.E. Maes, M. Schaekers, A. Armigliato, H. Cerva, A. Cullis, J. de Sande, H. Dinges, J. Hallais, V. Nayar, C. Pickering, J.-L. Stehlé, J. Van Landuyt, C. Walker, H. Werner, P. Salieri

Institutions: IMEC, Bologna Research Area, Siemens (Germany), Universidad Complutense de Madrid, Sopra (France)

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1970057735

FWCI: 1.228

Cites: 4

Cited by: 15

Related to: 10