Work

The influence of ion bombardment on the composition of reactively deposited alloy oxide films

Year: 1984

Type: article

Source: Vacuum

DOI: 10.1016/0042-207x(84)90150-7

Authors: Martin I Ridge, Ronald P Howson

Institution: Loughborough University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1973530356

FWCI:

Cites: 4

Cited by: 2

Related to: 10