Work

Fabrication options and operation principle for single-crystal silicon vibratory ring gyroscope

Year: 2005

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.583593

Authors: Shih-Chia Chang, Michael W. Putty

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1978007386

FWCI: 0.563

Cites:

Cited by: 3

Related to: 10