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Shih−Chia Chang

Observed names: Shih-Chia Chang, Shih‐Chia Chang, Shih–Chia Chang
OpenAlex ID: A5111555037
Oxygen chemisorption on tin oxide: Correlation between electrical conductivity and EPR measurements
1980 · Shih–Chia Chang · Journal of Vacuum Science and Technology · 418
Thin-film semiconductor NOxsensor
1979 · Shih-Chia Chang · IEEE Transactions on Electron Devices · 100
The crystallography of the polar (0001) Zn and (0001̄)O surfaces of zinc oxide
1974 · Shih-Chia Chang, Peter Mark · Surface Science · 81
Process Integration for active polysilicon resonant microstructures
1989 · Michael W. Putty, Shih-Chia Chang, et al. · Sensors and Actuators · 53
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The crystallography of the principal non-polar (112̄0) and (101̄0) surfaces of zinc oxide
1974 · Shih-Chia Chang, Peter Mark · Surface Science · 43
Integrated microrelays: concept and initial results
2002 · Han-Sheng Lee, C.H. Leung, et al. · Journal of Microelectromechanical Systems · 38
A large-force, fully-integrated MEMS magnetic actuator
2002 · J.A. Wright, Yu-Chong Tai, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 34
LEED analysis of the polar (0001)−Cd and (0001̄)−S surfaces of cadmium sulfide
1975 · Shih−Chia Chang, Peter Mark · Journal of Vacuum Science and Technology · 27
Electrostatically actuated copper-blade microrelays
2002 · Han-Sheng Lee, Chi H. Leung, et al. · Sensors and Actuators A Physical · 25
LEED analysis of the principal nonpolar (112̄0) and (101̄0) surfaces of cadmium sulfide
1975 · Shih−Chia Chang, Peter Mark · Journal of Vacuum Science and Technology · 25
Patterning of zinc oxide thin films
2003 · Shih-Chia Chang, D.B. Hicks, et al. · Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) · 19
Tin Oxide Microsensors
1986 · Shih-Chia Chang, David B. Hicks · ACS symposium series · 19
Micromachining and Microfabrication Process Technology II
1996 · S. W. Pang, Shih−Chia Chang · SPIE eBooks · 13
The effects of palladium–gold on the chemisorptive activities of thin film tin oxide
1983 · Shih-Chia Chang · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 13
The formation of microbridges on (100)-oriented silicon
1991 · Shih-Chia Chang, D B Hicks · Journal of Micromechanics and Microengineering · 12
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MEMS in Automobiles
2012 · Shih-Chia Chang · Springer eBooks · 10
Effects of ion implantation doping on electrical and chemisorptive properties of tin oxide thin films
1983 · Shih-Chia Chang · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 9
Lift-off Methods for MEMS Devices
2002 · Shih-Chia Chang, Jeffrey M. Kempisty · MRS Proceedings · 8
Fabrication of on-chip barium strontium titanate capacitors by metallo-organic decomposition
1998 · Antonio B. Catalan, Shih-Chia Chang, et al. · Journal of materials research/Pratt's guide to venture capital sources · 6
Micromachining and Microfabrication Process Technology III
1997 · Shih−Chia Chang, S. W. Pang · 5
Characterization of electroformed nickel microstructures
1995 · Qian Shi, Shih-Chia Chang, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Thin and Thick Films
1989 · Shih‐Chia Chang, Wen H. Ko · Sensors · 4
Tin oxide microsensors on thin silicon membranes
1986 · Shih−Chia Chang, David B. Hicks · 4
Fabrication options and operation principle for single-crystal silicon vibratory ring gyroscope
2005 · Shih-Chia Chang, Michael W. Putty · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Automotive applications for micromachining
1997 · Douglas R. Sparks, Shih-Chia Chang · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Works count: 41
Citation count: 995
H-index: 13
I10-index: 16
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