Work

A large-force, fully-integrated MEMS magnetic actuator

Year: 2002

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.1997.635219

Authors: J.A. Wright, Yu-Chong Tai, Shih-Chia Chang

Institutions: California Institute of Technology, General Motors (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2128090102

FWCI: 4.13

Cites: 6

Cited by: 34

Related to: 10