Design and use of a vacuum system for high rate reactive sputtering of TiO2/TiN/TiO2 solar control films
Year: 1988
Type: article
Source: Solar Energy Materials
Institutions: Loughborough University, Uppsala University
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1978125259