Work

High Spatial Resolution Sims With the Uc-hrl Scanning Ion Microprobe

Year: 1984

Type: article

Abstract: A new Ga+ scanning ion microprobe yields images at lateral resolution approaching 40 nm, making use of the secondary ions analyzed by an RF quadrupole mass filter.

Source: Le Journal de Physique Colloques

DOI: 10.1051/jphyscol:1984933

Authors: R. Levi-Setti, Y. L. Wang, G. Crow

Institution: University of Chicago

Language: French

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W1978187805

FWCI: 1.275

Cites:

Cited by: 42

Related to: 10