Work

Detection of arsenic dopant atoms in a silicon crystal using a spherical aberration corrected scanning transmission electron microscope

Year: 2010

Type: article

Source: Physical Review B

DOI: 10.1103/physrevb.81.035317

Authors: Y. Oshima, Y. Hashimoto, Y. Tanishiro, K. Takayanagi, H. Sawada, T. Kaneyama, Y. Kondo, N. Hashikawa, K. Asayama

Institutions: Tokyo Institute of Technology, Japan Science and Technology Agency, JEOL (Japan), Renesas Electronics (Japan)

Language: English

Topic: Advanced Electron Microscopy Techniques and Applications

Subfield: Structural Biology

Field: Biochemistry, Genetics and Molecular Biology

Domain: Life Sciences

Open Access status: closed

OpenAlex ID: W1978288458

FWCI: 1.884

Cites: 25

Cited by: 29

Related to: 10