Atomic layer deposition of BN thin films
Year: 2002
Type: article
Source: Thin Solid Films
Authors: Björn Mårlid, Mikael Ottosson, Ulrika Pettersson, Karin Larsson, Jan-Otto Carlsson
Institution: Uppsala University
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Funder: Vetenskapsrådet
OpenAlex ID: W1978399033