Work

Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate

Year: 2006

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2005.12.047

Authors: Kazuhiko Kano, Kazuki Arakawa, Yukihiro Takeuchi, Morito Akiyama, Naohiro Ueno, Nobuaki Kawahara

Institutions: Denso (Japan), National Institute of Advanced Industrial Science and Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1978399062

FWCI: 1.969

Cites: 11

Cited by: 39

Related to: 10