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Yukihiro Takeuchi

Observed name: Yukihiro TAKEUCHI
Institution: Denso (Japan)
OpenAlex ID: A5109166702
Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
2008 · Morito Akiyama, Toshihiro Kamohara, et al. · Advanced Materials · 1,093
Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate
2006 · Kazuhiko Kano, Kazuki Arakawa, et al. · Sensors and Actuators A Physical · 39
Critical-layer thickness of a pseudomorphic In0.8Ga0.2As heterostructure grown on InP
1991 · Munecazu Tacano, Yoshinobu Sugiyama, et al. · Applied Physics Letters · 20
Improvement of high aspect ratio Si etching by optimized oxygen plasma irradiation inserted DRIE
2009 · Junji Ohara, Yukihiro Takeuchi, et al. · Journal of Micromechanics and Microengineering · 19
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High electron mobility pseudomorphic In0.52Al0.48As/In0.8Ga0.2As heterostructure on InP grown by flux-stabilized MBE
1991 · Yoshinobu Sugiyama, Yukihiro Takeuchi, et al. · Journal of Crystal Growth · 19
Infrared absorption sensor for multiple gas sensing. Development of a Fabry–Perot spectrometer with ultrawide wavelength range
2013 · Tetsuya Enomoto, Megumi Suzuki, et al. · Electronics and Communications in Japan · 18
Very high electron mobility In0.8Ga0.2As heterostructure grown by molecular beam epitaxy
1991 · Munecazu Tacano, Yoshinobu Sugiyama, et al. · Journal of Electronic Materials · 15
Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity
2013 · Tomoki Tanemura, Shuichi Yamashita, et al. · Journal of Micromechanics and Microengineering · 14
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Critical layer thickness of In0.80Ga0.20As/In0.52Al0.48As heterostructures
1993 · Takashi Taguchi, Yukihiro Takeuchi, et al. · Journal of Crystal Growth · 14
New DRIE Process with Sidewall Protection Layer Formed by O2 Plasma Irradiation
2003 · Junji Ohara, Kazuhiko Kano, et al. · IEEJ Transactions on Sensors and Micromachines · 11
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Infrared Absorption Sensor for Multiple Gas Sensing
2011 · Tetsuya Enomoto, Megumi Suzuki, et al. · IEEJ Transactions on Sensors and Micromachines · 8
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Development of RIE‐lag Reduction Technique for Si Deep Etching Using Double Protection Layer Method
2010 · Junji Ohara, Kazushi Asami, et al. · IEEJ Transactions on Electrical and Electronic Engineering · 7
High-Power Vertical-Cavity Surface-Emitting Laser under a Short Pulsed Operation
2009 · Nobuyuki Otake, Katsunori Abe, et al. · Applied Physics Express · 5
In-depth distribution of ion irradiation defects evaluated by mobility of Al0.3Ga0.7As/GaAs two-dimensional electron gas
1992 · Yukihiro Takeuchi, Hajime Soga, et al. · Applied Physics Letters · 5
Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration
2012 · Tomoki Tanemura, Shuichi Yamashita, et al. · Japanese Journal of Applied Physics · 4
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Development of fabrication process for integrated micro-optical elements on Si substrate
2007 · Junji Ohara, Kazuhiko Kano, et al. · Sensors and Actuators A Physical · 4
In situ Hall measurement of two-dimensional electron gas at Al0.3Ga0.7As/GaAs interface irradiated with 10-keV Ar ions
1992 · Toshihiko Kanayama, Yukihiro Takeuchi, et al. · Applied Physics Letters · 4
Out-of-plane Bending Vibration Fracture Test of Polycrystalline Silicon Thin-film Membrane
2012 · Tomoki Tanemura, Shuichi Yamashita, et al. · IEEJ Transactions on Sensors and Micromachines · 3
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A new fabrication process for micro optical elements using drie and oxidation
2007 · Junji Ohara, Kazuhiko Kano, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 3
Analysis of heat transfer in micro-bridge heater.
1999 · Hiroyuki Wado, Toshimasa Yamamoto, et al. · 3
Multi-Gas Sensor by Infrared Spectrometer
2012 · Tetsuya Enomoto, Tomoki Tanemura, et al. · Lecture notes in electrical engineering · 2
High-Pulsed-Power (49W) Vertical-Cavity Surface-Emitting Laser with Five Quantum Wells by Uniform Current Injection into Large Emitting Area
2011 · Nobuyuki Otake, Eiji Kojima, et al. · IEICE Electronics Express · 2
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Improvement of the optical transmittance of a micro prism made from a Si substrate by DRIE, oxidation and SiO2film refilling
2009 · Junji Ohara, Yukihiro Takeuchi, et al. · Journal of Micromechanics and Microengineering · 2
Demonstration of infrared absorption spectroscopy by using SOI-based Si/SiO2 high-mesa waveguides
2008 · Intekhab Alam, Yasunari Matsunaga, et al. · IEICE Technical Report; IEICE Tech. Rep. · 2
Development of Si DRIE Process Allowing Simultaneous Etching from Narrow and Wide Mask Openings
2008 · Junji Ohara, Yukihiro Takeuchi, et al. · IEEJ Transactions on Sensors and Micromachines · 2
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Works count: 41
Citation count: 1,322
H-index: 10
I10-index: 10
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