Wideband and hysteresis-free regulation of piezoelectric actuator based on induced current for high-speed scanning probe microscopy
Year: 2006
Type: article
Source: Review of Scientific Instruments
DOI: 10.1063/1.2356850
Institutions: Japan Science and Technology Agency, The University of Osaka
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1978674904