Method for modulating the wafer bow of free-standing GaN substrates via inductively coupled plasma etching
Year: 2010
Type: article
Source: Journal of Crystal Growth
Authors: Kuei-Ming Chen, Yen-Hsien Yeh, Yin-Hao Wu, Chen-Hao Chiang, Din-Ru Yang, Chu-Li Chao, Tung-Wei Chi, Yen-Hsang Fang, Jenq-Dar Tsay, Wei-I Lee
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Council
OpenAlex ID: W1978990826