Surface morphology and structure of ultra-thin magnesium oxide grown on (100) silicon by atomic layer deposition oxidation
Year: 2011
Type: article
Source: Thin Solid Films
Institutions: Centre National de la Recherche Scientifique, Aix-Marseille Université, Centre Interdisciplinaire de Nanoscience de Marseille, Belarusian State University of Informatics and Radioelectronics, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Institut Rayonnement-Matière de Saclay, Université de Cergy-Pontoise
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1980288592