Applications of angular scatterometry for the measurement of multiply periodic features
Year: 2003
Type: conference-paper
DOI: 10.1117/12.488116
Authors: Christopher J. Raymond, Michael E. Littau, Byoungjoo J. Youn, Chang-Jin Sohn, Jin A. Kim, Young S. Kang
Institution: Samsung Electronics (South Korea)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funders: University of Pittsburgh, Samsung
OpenAlex ID: W1983648052