Work

Numerical simulation of oxygen transport during the CZ silicon crystal growth process

Year: 2010

Type: article

Source: Journal of Crystal Growth

DOI: 10.1016/j.jcrysgro.2010.11.145

Authors: Jyh-Chen Chen, Ying-Yang Teng, Wan-Ting Wun, Chung-Wei Lu, Hsueh-I Chen, Chi-Yung Chen, Wen-Chieh Lan

Institutions: National Central University, Sino-American Silicon Products (Taiwan)

Language: English

Topic: Solidification and crystal growth phenomena

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Council

Award: G474687737

OpenAlex ID: W1989309403

FWCI: 0.98

Cites: 18

Cited by: 63

Related to: 10