Work

The use of vector scanning for producing arbitrary surface contours with a focused ion beam

Year: 1988

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

DOI: 10.1116/1.584179

Authors: G. Crow, J. Puretz, J. Orloff, R. K. DeFreez, R. A. Elliott

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1992019205

FWCI: 2.355

Cites:

Cited by: 16

Related to: 10