Work

A novel and robust method for the accurate magnification characterization and calibration of out-of-fab SEM cluster tools

Year: 2004

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.536047

Authors: Al Sicignano, Arkady Nikitin, Dmitry Yeremin, Tim Goldburt, Bryan Tracy

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1996748844

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Cites:

Cited by: 1

Related to: 10