Reactive gas effects in pulsed magnetron sputtering: Time-resolved investigation
Year: 2006
Type: article
Source: Surface and Coatings Technology
Authors: Th. Welzel, Th. Dunger, F. Richter
Institution: Chemnitz University of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: European Commission
OpenAlex ID: W1997000695