Low dislocation density GaAs on Si heteroepitaxy with atomic hydrogen irradiation for optoelectronic integration
Year: 1993
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.354029
Institution: University of Tsukuba
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1998540663
