Work

Properties of fluoride DUV excimer laser optics: influence of the number of dielectric layers

Year: 2000

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.379314

Authors: Winfried Arens, Detlev Ristau, Jens Ullmann, Christoph Zaczek, Roland Thielsch, Norbert Kaiser, Angela Duparre, Oliver Apel, Klaus R. Mann, Hans Lauth, Helmut Bernitzki, Johanes Ebert, Stefan Schippel, H. Heyer

Institutions: Laser Zentrum Hannover, Carl Zeiss (Germany), Fraunhofer Institute for Applied Optics and Precision Engineering, Institut für Nanophotonik, Jenoptik (Germany)

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1998720287

FWCI: 2.127

Cites:

Cited by: 5

Related to: 10