Work

Fabrication of multi-tiered structures on step and flash imprint lithography templates

Year: 2003

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/s0167-9317(03)00075-3

Authors: S. Johnson, D.J. Resnick, D. Mancini, K. Nordquist, W.J. Dauksher, K. Gehoski, J.H. Baker, L. Dues, A. Hooper, T.C. Bailey, S.V. Sreenivasan, J.G. Ekerdt, C.G. Willson

Institutions: Texas Materials Institute, The University of Texas at Austin, Motorola (United States)

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000267719

FWCI: 1.502

Cites: 9

Cited by: 23

Related to: 10