Work

Selective deposition of tungsten—prediction of selectivity

Year: 1985

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.572868

Authors: Jan-Otto Carlsson, Mats Boman

Institution: Uppsala University

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000306401

FWCI: 1.095

Cites:

Cited by: 34

Related to: 10