Work

Bottom‐Up Engineering of Subnanometer Copper Diffusion Barriers Using NH2‐Derived Self‐Assembled Monolayers

Year: 2010

Type: article

Source: Advanced Functional Materials

DOI: 10.1002/adfm.200902072

Authors: Arantxa Maestre Caro, Silvia Armini, Olivier Richard, Guido Maes, Gustaaf Borghs, Caroline M. Whelan, Youssef Travaly

Institutions: IMEC, KU Leuven, European Cooperation in Science and Technology

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000785224

FWCI: 1.444

Cites: 20

Cited by: 60

Related to: 10