Work

Fluoro-alcohol materials with tailored interfacial properties for immersion lithography

Year: 2007

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.712768

Authors: Daniel P. Sanders, Linda K. Sundberg, Ratnam Sooriyakumaran, Phillip J. Brock, Richard A. DiPietro, Hoa D. Truong, Dolores C. Miller, Margaret C. Lawson, Robert D. Allen

Institutions: IBM (United States), IBM Research - Almaden

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2002128388

FWCI: 5.537

Cites: 16

Cited by: 18

Related to: 10