Surface-layer composition changes in sputtered alloys and compounds
Year: 1977
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.89285
Authors: Z. L. Liau, W. L. Brown, R. Homer, J. M. Poate
Institution: California Institute of Technology
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2003014071