New etchant for crystallographic defect studies in thin SOI materials (<1000 Å)
Year: 1993
Type: article
Source: Electronics Letters
DOI: 10.1049/el:19930527
Authors: L.F. Giles, A. Nejim, P.L.F. Hemment
Institution: University of Surrey
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2004494884