Performance of a step-and-scan system for DUV lithography
Year: 1997
Type: conference-paper
DOI: 10.1117/12.276002
Authors: Gerard de Zwart, Martin A. van den Brink, Richard A. George, Danu Satriasaputra, Jan Baselmans, H. Butler, Jan B. van Schoot, Jos de Klerk
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2004649456